Bo Xie

Bo Xie

Applied Materials, Inc. - Santa Clara / United States
Engineering & Technology / Metallurgical & Materials Engineering
AD Scientific Index ID: 4402732
person_outline Bo Xie's MOST POPULAR ARTICLES
1-) UV assisted silylation for recovery and pore sealing of damaged low K filmsBO Xie, AT Demos, KS Yim, T Nowak, K ChanUS Patent 8,492,170, 20132992013
2-) Method and hardware for cleaning UV chambersS Baluja, AT Demos, K Chan, JC Rocha-Alvarez, SA Hendrickson, ...US Patent 9,364,871, 20162102016
3-) Method for seasoning uv chamber optical components to avoid degradationS Baluja, AT Demos, BO Xie, JC Rocha-AlvarezUS Patent App. 13/719,047, 20131062013
4-) Silylation of porous methylsilsesquioxane films in supercritical carbon dioxideB Xie, AJ MuscatMicroelectronic Engineering 76 (1-4), 52-59, 2004732004
5-) Removal of copper from silicon surfaces using hexafluoroacetylacetone (hfacH) dissolved in supercritical carbon dioxideB Xie, CC Finstad, AJ MuscatChemistry of materials 17 (7), 1753-1764, 2005472005