Abhishek Vikram

Abhishek Vikram

Cornell University - Ithaca / United States
Business & Management / Business Administration
AD Scientific Index ID: 4598015
person_outline Abhishek Vikram's MOST POPULAR ARTICLES
1-) Pattern weakness and strength detection and tracking during a semiconductor device fabrication processK Zafar, C Hu, Y Chen, Y Ma, C Hsiang, J Chen, R Xu, A Vikram, P ZhangUS Patent 9,846,934, 2017422017
2-) Pattern centric process controlC Hu, K Zafar, Y Chen, Y Ma, R Lv, J Chen, A Vikram, Y Xu, P ZhangUS Patent App. 15/944,080, 2018292018
3-) OPC verification and hotspot management for yield enhancement through layout analysisG Yoo, J Kim, T Lee, A Jung, H Yang, D Yim, S Park, K Maruyama, ...Metrology, Inspection, and Process Control for Microlithography XXV 7971 …, 2011192011
4-) Hot spot management through design based metrology: measurement and filteringT Lee, H Yang, J Kim, A Jung, G Yoo, D Yim, S Park, A Ishikawa, ...Lithography Asia 2009 7520, 567-577, 2009172009
5-) Simulation based mask defect repair verification and dispositionE Guo, S Zhao, S Qian, G Cheng, A Vikram, L Li, Y Chen, C Hsiang, ...Photomask Technology 2009 7488, 141-150, 2009162009