Anatoly Burov

Anatoly Burov

KLA - / United States
Others
AD Scientific Index ID: 4969895
person_outline Anatoly Burov's MOST POPULAR ARTICLES
1-) Water immersion optical lithography for the 45-nm node BW Smith, H Kang, A Bourov, F Cropanese, Y Fan Optical Microlithography XVI 5040, 679-689, 2003 752003
2-) Approaching the numerical aperture of water immersion lithography at 193-nm BW Smith, A Bourov, Y Fan, LV Zavyalova, NV Lafferty, FC Cropanese Optical Microlithography XVII 5377, 273-284, 2004 612004
3-) Water immersion optical lithography at 193 nm BW Smith, A Bourov, H Kang, F Cropanese, Y Fan, N Lafferty, ... Journal of Micro/Nanolithography, MEMS and MOEMS 3 (1), 44-51, 2004 522004
4-) Immersion microlithography at 193 nm with a Talbot prism interferometerA Bourov, Y Fan, FC Cropanese, NV Lafferty, LV Zavyalova, H Kang, ...Optical Microlithography XVII 5377, 1573-1578, 2004372004
5-) Flare and its impact on low-k1 KrF and ArF lithographyBM La Fontaine, MV Dusa, A Acheta, C Chen, A Bourov, HJ Levinson, ...Optical Microlithography XV 4691, 44-56, 2002332002