Andrey Tychkov

Andrey Tychkov

ASML Holding - Veldhoven / Netherlands
Natural Sciences / Physics
AD Scientific Index ID: 4965497
person_outline Andrey Tychkov's MOST POPULAR ARTICLES
1-) Degenerate Bose-Fermi mixture of metastable atoms JM McNamara, T Jeltes, AS Tychkov, W Hogervorst, W Vassen Physical Review Letters 97 (8), 080404, 2006 1472006
2-) Metastable helium Bose-Einstein condensate with a large number of atoms AS Tychkov, T Jeltes, JM McNamara, PJJ Tol, N Herschbach, ... Physical Review A 73 (3), 031603, 2006 752006
3-) Lithographic apparatus and methodJJM Baselmans, AS TychkovUS Patent 7,834,980, 2010
4-) Magnetic trapping and evaporative cooling of metastable triplet heliumN Herschbach, P Tol, A Tychkov, W Hogervorst, W VassenJournal of Optics B: Quantum and Semiclassical Optics 5 (2), S65, 2003252003
5-) Speckle in optical lithography and its influence on linewidth roughnessO Noordman, A Tychkov, J Baselmans, J Tsacoyeanes, G Politi, M Patra, ...Journal of Micro/Nanolithography, MEMS and MOEMS 8 (4), 043002-043002-10, 2009