Anuja De Silva

Anuja De Silva

Lam Research Corp. - Fremont / United States
Engineering & Technology / Metallurgical & Materials Engineering
AD Scientific Index ID: 4995302
person_outline Anuja De Silva's MOST POPULAR ARTICLES
1-) Nanoscale three-dimensional patterning of molecular resists by scanning probes D Pires, JL Hedrick, A De Silva, J Frommer, B Gotsmann, H Wolf, ... Science 328 (5979), 732-735, 2010 3742010
2-) Molecular Glass Resists as High‐Resolution Patterning Materials A De Silva, NM Felix, CK Ober Advanced Materials 20 (17), 3355-3361, 2008 942008
3-) Study of the Structure− Properties Relationship of Phenolic Molecular Glass Resists for Next Generation Photolithography A De Silva, JK Lee, X André, NM Felix, HB Cao, H Deng, CK Ober Chemistry of Materials 20 (4), 1606-1613, 2008 692008
4-) Characterization of the photoacid diffusion length and reaction kinetics in EUV photoresists with IR spectroscopyS Kang, W Wu, KW Choi, A De Silva, CK Ober, VM PrabhuMacromolecules 43 (9), 4275-4286, 2010602010
5-) Fifteen nanometer resolved patterns in selective area atomic layer deposition—defectivity reduction by monolayer designR Wojtecki, M Mettry, NF Fine Nathel, A Friz, A De Silva, N Arellano, ...ACS applied materials & interfaces 10 (44), 38630-38637, 2018502018