Aravind Narayana Samy

Aravind Narayana Samy

ASML Holding - Veldhoven / Netherlands
Architecture and Design / Design
AD Scientific Index ID: 5584622
person_outline Aravind Narayana Samy's MOST POPULAR ARTICLES
1-) Role of 3D photo-resist simulation for advanced technology nodes Optical Microlithography XXVI 8683, 458-466, 2013
2-) Scanner correction capabilities aware CMP lithography hotspot analysis Design-Process-Technology Co-optimization for Manufacturability VIII 9053 …, 2014
3-) Lithography process window prediction based on design data US Patent App. 15/042,779, 2016
4-) Optical proximity correction taking into account wafer topography US Patent App. 14/556,711, 2016
5-) 28nm node process optimization: a lithography centric view 30th European Mask and Lithography Conference 9231, 22-31, 2014