Arturo A Ayon

Arturo A Ayon

University of Texas San Antonio - San Antonio / United States
Natural Sciences / Physics
AD Scientific Index ID: 1679037
The University of Texas at San Antonio
person_outline Arturo A Ayon's MOST POPULAR ARTICLES
1-) Characterization of a time multiplexed inductively coupled plasma etcherAA Ayón, R Braff, CC Lin, HH Sawin, MA SchmidtJournal of the electrochemical Society 146 (1), 339, 19995531999
2-) Molding of deep polydimethylsiloxane microstructures for microfluidics and biological applicationsA Folch, A Ayon, O Hurtado, MA Schmidt, M Toner3641999
3-) A six-wafer combustion system for a silicon micro gas turbine engineA Mehra, X Zhang, AA Ayón, IA Waitz, MA Schmidt, CM SpadacciniJournal of Microelectromechanical systems 9 (4), 517-527, 20003542000
4-) Power MEMS and microenginesAH Epstein, SD Senturia, G Anathasuresh, A Ayon, K Breuer, KS Chen, ...Proceedings of International Solid State Sensors and Actuators Conference …, 19973121997
5-) Effect of process parameters on the surface morphology and mechanical performance of silicon structures after deep reactive ion etching (DRIE)KS Chen, AA Ayón, X Zhang, SM SpearingJournal of Microelectromechanical Systems 11 (3), 264-275, 20023072002