Changgong Wang

Changgong Wang

Applied Materials, Inc. - Santa Clara / United States
Engineering & Technology / Metallurgical & Materials Engineering
AD Scientific Index ID: 4402417
person_outline Changgong Wang's MOST POPULAR ARTICLES
1-) Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species US Patent 8,877,655, 2014
2-) Multiple vapor sources for vapor deposition US Patent 9,238,865, 2016
3-) ALD of metal silicate films US Patent 7,795,160, 2010
4-) ALD of metal silicate films US Patent 7,972,977, 2011
5-) ALD of metal silicate filmsC Wang, E Shero, G WilkUS Patent 7,972,977, 20113812011