Changho Oh

Changho Oh

Carnegie Mellon University - Pittsburgh / United States
Engineering & Technology / Mechanical Engineering
AD Scientific Index ID: 5680602
person_outline Changho Oh's MOST POPULAR ARTICLES
1-) The strong effect on MEMS switch reliability of film deposition conditions and electrode geometryC Oh, CB Stovall, W Dhaouadi, RW Carpick, MP de BoerMicroelectronics Reliability 98, 131-143, 2019152019
2-) In situ oxygen plasma cleaning of microswitch surfaces—comparison of Ti and graphite electrodesC Oh, F Streller, WR Ashurst, RW Carpick, MP de BoerJournal of Micromechanics and Microengineering 26 (11), 115020, 2016152016
3-) Effects of hot switching and contamination on contact reliability of Pt-coated microswitchesC Oh, M de BoerIEEE Transactions on Components, Packaging and Manufacturing Technology 10 …, 201972019
4-) Effectiveness of oxygen plasma versus UHV bakeout in cleaning MEMS switch surfacesC Oh, F Streller, RW Carpick, MP de Boer2015 IEEE 61st Holm Conference on Electrical Contacts (Holm), 358-362, 201572015
5-) Optimization and contact reliability of TiN-coated microswitches in various gas environmentsC Oh, MP de BoerJournal of Microelectromechanical Systems 28 (1), 95-106, 201862018