Cornel Bozdog

Lehigh University - Bethlehem / United States

Natural Sciences / Physics

AD Scientific Index ID: 1459211

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Cornel Bozdog's MOST POPULAR ARTICLES

1-) A holistic metrology approach: hybrid metrology utilizing scatterometry, CD-AFM, and CD-SEMA Vaid, BB Yan, YT Jiang, M Kelling, C Hartig, J Allgair, P Ebersbach, ...Metrology, Inspection, and Process Control for Microlithography XXV 7971, 21-40, 2011722011

2-) Optical Detection of Electron Paramagnetic Resonance in Electron-Irradiated GaNC Bozdog, H Przybylinska, GD Watkins, V Harle, F Scholz, M Mayer, ...Phys. Rev. B 59, 12479, 1999721999

3-) Intrinsic defects in GaN. I. Ga sublattice defects observed by optical detection of electron paramagnetic resonanceKH Chow, LS Vlasenko, P Johannesen, C Bozdog, GD Watkins, A Usui, ...Phys. Rev. B 69, 5207, 2004542004

4-) Electron Paramagnetic Resonance of Cu(d9) in GaNC Bozdog, KH Chow, GD Watkins, H Sunakawa, N Kuroda, U A.Phys. Rev. B 62, 12923, 2000272000

5-) Holistic metrology approach: hybrid metrology utilizing scatterometry, critical dimension-atomic force microscope and critical dimension-scanning electron microscopeA Vaid, BB Yan, YT Jiang, M Kelling, C Hartig, J Allgair, P Ebersbach, ...Journal of Micro/Nanolithography, MEMS and MOEMS 10 (4), 043016-043016-13, 2011262011

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