Daniel Goodman

Tokyo Electron - Tokyo / Japan

Natural Sciences / Physics

AD Scientific Index ID: 4969874

東京エレクトロン

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Daniel Goodman's MOST POPULAR ARTICLES

1-) Radio frequency power delivery system US Patent 7,764,140, 2010

2-) RF power supply with integrated matching network US Patent 6,887,339, 2005

3-) Methods and apparatus for calibration and metrology for an integrated RF generator system US Patent 7,122,965, 2006

4-) System for extracting a high power beam comprising air dynamic and foil windows US Patent 5,659,223, 1997

5-) Radio frequency power delivery system US Patent 8,633,782, 2014

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