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Deog Gyun Cho
Jeonbuk National University - - / South Korea
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AD Scientific Index ID: 4857201
전부 국립 대학교
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Deog Gyun Cho's MOST POPULAR ARTICLES
1-)
Absolute density measurement of hydrogen atom in inductively coupled Ar/H2 plasmas using vacuum ultraviolet absorption spectroscopyDG Cho, J Han, D Han, SY MoonCurrent Applied Physics 20 (4), 550-556, 202062020
2-)
Optical and electrical investigation of DC micro-hollow cathode discharge in He/O2 and He/H2 mixtureDG Cho, SY MoonPhysics of Plasmas 25 (7), 201862018
3-)
Development of a probe-type optical absorption spectroscopic system for spatially resolved CF2 density measurement in inductively coupled C4F8/Ar plasmasJ Han, DG Cho, R Mauchauffé, SY MoonReview of Scientific Instruments 91 (1), 013504, 202012020
4-)
Plasma surface kinetics studies of silicon dioxide etch process in inductively coupled fluorocarbon plasmasWS Chang, DH Yu, DG Cho, YG Yook, PR Chun, SA Lee, DC Kwon, ...APS Annual Gaseous Electronics Meeting Abstracts, MR1. 008, 201312013
5-)
Measurement of atomic hydrogen density in the plasma boundary region of inductively coupled plasma by VUV absorption spectroscopyDG Cho, A Moon, Y You, DH Ryu, SY MoonAPS Annual Gaseous Electronics Meeting Abstracts, GT1. 052, 20182018
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