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Dexin Kong
AD Scientific Index 2024
Engineering & Technology / Electrical & Electronic Engineering
Arizona State University - Tempe / United States
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Dexin Kong's MOST POPULAR ARTICLES
1-)
Stacked nanosheet gate-all-around transistor to enable scaling beyond FinFETN Loubet, T Hook, P Montanini, CW Yeung, S Kanakasabapathy, ...2017 Symposium on VLSI Technology, T230-T231, 20175132017
2-)
Full bottom dielectric isolation to enable stacked nanosheet transistor for low power and high performance applicationsJ Zhang, J Frougier, A Greene, X Miao, L Yu, R Vega, P Montanini, ...2019 IEEE International Electron Devices Meeting (IEDM), 11.6. 1-11.6. 4, 2019312019
3-)
Machine learning and hybrid metrology using scatterometry and LE-XRF to detect voids in copper linesD Kong, K Motoyama, H Huang, B Mendoza, M Breton, GR Muthinti, ...Metrology, Inspection, and Process Control for Microlithography XXXIII 10959 …, 2019112019
4-)
Measuring local CD uniformity in EUV vias with scatterometry and machine learningD Kong, D Schmidt, J Church, CC Liu, M Breton, C Murray, E Miller, L Meli, ...Metrology, Inspection, and Process Control for Microlithography XXXIV 11325 …, 2020112020
5-)
Integration scheme for non-volatile memory on gate-all-around structureD Kong, Z Bi, Z Xu, K ChengUS Patent 10,615,288, 2020112020
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