Dren Qerimi

Dren Qerimi

University of Illinois Urbana Champaign - Champaign / United States
Natural Sciences / Physics
AD Scientific Index ID: 5570096
person_outline Dren Qerimi's MOST POPULAR ARTICLES
1-) Radical probe system for in situ measurements of radical densities of hydrogen, oxygen, and nitrogen Journal of Vacuum Science & Technology A 39 (2), 2021
2-) Study of a linear surface wave plasma source for tin removal in an extreme ultraviolet source Journal of Vacuum Science & Technology B 38 (5), 2020
3-) Determination of recombination coefficients for hydrogen, oxygen, and nitrogen gasses via in situ radical probe system Journal of Vacuum Science & Technology A 39 (2), 2021
4-) Tin removal by an annular surface wave plasma antenna in an extreme ultraviolet lithography source Journal of Applied Physics 132 (11), 2022
5-) Study of Sn removal by surface wave plasma for source cleaning Extreme Ultraviolet (EUV) Lithography VIII 10143, 522-529, 2017