Frederic Lazzarino

Frederic Lazzarino

Interuniversity Microelectronics Centre - / Belgium
Others
AD Scientific Index ID: 4983713
person_outline Frederic Lazzarino's MOST POPULAR ARTICLES
1-) Mold deformation in nanoimprint lithography F Lazzarino, C Gourgon, P Schiavone, C Perret Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2004 912004
2-) Influence of pattern density in nanoimprint lithography C Gourgon, C Perret, G Micouin, F Lazzarino, JH Tortai, O Joubert, ... Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2003 872003
3-) Characterization of 8-in. wafers printed by nanoimprint lithography C Perret, C Gourgon, F Lazzarino, J Tallal, S Landis, R Pelzer Microelectronic Engineering 73, 172-177, 2004 722004
4-) Direct metal etch of ruthenium for advanced interconnectS Paolillo, D Wan, F Lazzarino, N Rassoul, D Piumi, Z TőkeiJournal of Vacuum Science & Technology B 36 (3), 2018632018
5-) Uniformity across 200 mm silicon wafers printed by nanoimprint lithographyC Gourgon, C Perret, J Tallal, F Lazzarino, S Landis, O Joubert, R PelzerJournal of Physics D: Applied Physics 38 (1), 70, 2004562004