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Geun-Young Yeom
Sungkyunkwan University - Seoul / South Korea
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AD Scientific Index ID: 360776
성균관대학교
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Geun-Young Yeom's MOST POPULAR ARTICLES
1-)
Fabrication of InAs composite channel high electron mobility transistors by utilizing Ne-based atomic layer etchingTW Kim, JI Song, JH Jang, DH Kim, SD Park, JW Bae, GY YeomApplied physics letters 91 (10), 20079442007
2-)
Atomic layer etching apparatus and etching method using the sameG Yeom, WS Lim, P Sang-Duk, YY Kim, BJ Park, JK YeonUS Patent App. 12/712,944, 20114482011
3-)
Atomic layer deposition apparatus using neutral beam and method of depositing atomic layer using the sameG Yeom, DH Lee, BJ Park, KJ AhnUS Patent 7,919,142, 20113462011
4-)
Neutral beam-assisted atomic layer chemical vapor deposition apparatus and method of processing substrate using the sameG Yeom, BJ Park, SW Kim, JT LimUS Patent 7,799,706, 20103462010
5-)
Flexible Molybdenum Disulfide (MoS2) Atomic Layers for Wearable Electronics and OptoelectronicsE Singh, P Singh, KS Kim, GY Yeom, HS NalwaACS applied materials & interfaces 11 (12), 11061-11105, 20193452019
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