Hai Deng

Hai Deng

Fudan University - Shanghai / China
Engineering & Technology / Metallurgical & Materials Engineering
AD Scientific Index ID: 4376841
复旦大学
person_outline Hai Deng's MOST POPULAR ARTICLES
1-) Immersion liquids with siloxane polymer for immersion lithographyH Deng, Y Wang, HC Liou, HK Choi, RM Meagley, E PutnaUS Patent 7,391,501, 20084242008
2-) Acid distribution in chemically amplified extreme ultraviolet resistT Kozawa, S Tagawa, HB Cao, H Deng, MJ LeesonJournal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 20071542007
3-) Isospecific polymerization of methyl methacrylate initiated by chiral zirconocenedimethyl/Ph3CB (C6F5) 4 in the presence of lewis acidH Deng, T Shiono, K SogaMacromolecules 28 (9), 3067-3073, 19951541995
4-) Stereospecific Polymerization of Methyl Methacrylate Initiated by Zirconocene dimethyl/B (C6F5) 3 (or Ph3C B (C6F5) 4)/Zn (C2H5) 2K Soga, H Deng, T Yano, T ShionoMacromolecules 27 (26), 7938-7940, 19941391994
5-) Sub-50 nm feature sizes using positive tone molecular glass resists for EUV lithographySW Chang, R Ayothi, D Bratton, D Yang, N Felix, HB Cao, H Deng, ...Journal of Materials Chemistry 16 (15), 1470-1474, 20061132006