He Ren

He Ren

Applied Materials, Inc. - Santa Clara / United States
Others
AD Scientific Index ID: 4401608
person_outline He Ren's MOST POPULAR ARTICLES
1-) Dry-etch selectivityH Ren, JG Yang, J Baek, A Wang, S Park, S Garg, X Chen, NK IngleUS Patent 8,969,212, 20151842015
2-) Etch remnant removalH Ren, NK Ingle, A WangUS Patent App. 13/791,372, 20131872013
3-) Dry-etch selectivityH Ren, JG Yang, J Baek, A Wang, S Park, S Garg, X Chen, NK IngleUS Patent 9,384,997, 20161842016
4-) Pulsed dc plasma etching process and apparatusS Deshmukh, H Ren, J LiuUS Patent App. 14/200,779, 20141642014
5-) Self-aligned interconnects formed using substractive techniquesB Mebarki, H Dai, Y Chen, H Ren, M NaikUS Patent 9,761,489, 2017762017