Henry Erk

Henry Erk

GlobalWafers - Hsinchu / Taiwan
Others
AD Scientific Index ID: 4970086
person_outline Henry Erk's MOST POPULAR ARTICLES
1-) Acid‐based etching of silicon wafers: Mass‐transfer and kinetic effects MS Kulkarni, HF Erk Journal of the electrochemical Society 147 (1), 176, 2000 1172000
2-) Method and apparatus for processing a semiconductor wafer using novel final polishing method A Grabbe, M Bjelopavlic, AS Hull, ML Haler, GD Zhang, HF Erk, YB Xin US Patent 6,709,981, 2004 602004
3-) Process and apparatus for etching semiconductor wafers HF Erk, RR Vandamme US Patent 5,340,437, 1994 601994
4-) Elimination of carbon contamination from silicon kerf using a furnace aerosol reactor methodologyM Vazquez-Pufleau, TS Chadha, G Yablonsky, HF Erk, P BiswasIndustrial & Engineering Chemistry Research 54 (22), 5914-5920, 2015522015
5-) Post-lapping cleaning process for silicon wafersJ Chai, HF Erk, JA Schmidt, TE DoaneUS Patent 5,837,662, 1998461998