Hirohisa Hirayanagi

Hirohisa Hirayanagi

Waseda University - Tokyo / Japan
Others
AD Scientific Index ID: 4812330
早稲田大学
person_outline Hirohisa Hirayanagi's MOST POPULAR ARTICLES
1-) Ion beam generating apparatus, substrate processing apparatus and method of manufacturing electronic device H Hirayanagi, A Miyoshi, EN Abarra US Patent App. 13/382,002, 2012 252012
2-) Ion beam generator, and substrate processing apparatus and production method of electronic device using the ion beam generator H Hirayanagi, A Miyoshi, EN Abarra US Patent 8,536,539, 2013 42013
3-) Vacuum processing apparatusY Kajihara, S Hiramatsu, K Yamanaka, T Ueda, K Yoshibayashi, K Sato, ...US Patent App. 14/263,696, 201412014
4-) Inductively coupled plasma processing apparatusH Hirayanagi, K Sakamoto, T Osada, Y KodairaUS Patent App. 12/211,023, 200912009