Ivo Rangelow

Ivo Rangelow

Technische Universität Ilmenau - Ilmenau / Germany
Others
AD Scientific Index ID: 1780822
Ilmenau University of Technology
person_outline Ivo Rangelow's MOST POPULAR ARTICLES
1-) Radiation hard silicon detectors—Developments by the RD48 (ROSE) collaborationG Lindström, M Ahmed, S Albergo, P Allport, D Anderson, L Andricek, ...Nuclear Instruments and Methods in Physics Research Section A: Accelerators …, 2001620*2001
2-) Critical tasks in high aspect ratio silicon dry etching for microelectromechanical systemsIW RangelowJournal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 21 (4 …, 20032712003
3-) Components for high speed atomic force microscopyGE Fantner, G Schitter, JH Kindt, T Ivanov, K Ivanova, R Patel, ...Ultramicroscopy 106 (8-9), 881-887, 20062702006
4-) Low pressure plasmas and microstructuring technologyG FranzSpringer Science & Business Media, 20091672009
5-) Electrostatically driven microgripperBE Volland, H Heerlein, IW RangelowMicroelectronic engineering 61, 1015-1023, 20021632002