Jaewon Lee

Jaewon Lee

Hanyang University - Seoul / South Korea
Engineering & Technology / Electrical & Electronic Engineering
AD Scientific Index ID: 4863251
한양대학교
person_outline Jaewon Lee's MOST POPULAR ARTICLES
1-) Effect of remote inductively coupled plasma (ICP) on the electron energy probability function of an in-tandem main ICPJ Lee, KH Kim, CW ChungPhysics of Plasmas 24 (2), 023503, 2017102017
2-) The sheath effect on the floating harmonic methodJ Lee, KH Kim, CW ChungPhysics of Plasmas 22 (12), 123503, 201532015
3-) The radio-frequency fluctuation effect on the floating harmonic methodJ Lee, KH Kim, DH Kim, CW ChungPhysics of Plasmas 23 (8), 083517, 201612016
4-) The effect of rf plasma fluctuation on floating harmonic probesJ Lee, K Kim, S Jeon, CW ChungAPS Annual Gaseous Electronics Meeting Abstracts, GT1. 037, 20142014
5-) A study of increasing radical density and etch rate using remote plasma generator systemJ Lee, K Kim, SW Cho, CW ChungAPS Annual Gaseous Electronics Meeting Abstracts, MR1. 028, 20132013