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Jengyi E Yu
Lam Research Corp. - Fremont / United States
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AD Scientific Index ID: 5439121
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Jengyi E Yu's MOST POPULAR ARTICLES
1-)
Metal and silicon containing capping layers for interconnectsJ Yu, G Jiang, P Subramonium, R Shaviv, HJ Wu, N ShankarUS Patent 8,753,978, 20144142014
2-)
Etching substrates using ale and selective depositionS Tan, J Yu, R Wise, N Shamma, Y PanUS Patent 10,269,566, 20191362019
3-)
Predicting synergy in atomic layer etchingKJ Kanarik, S Tan, W Yang, T Kim, T Lill, A Kabansky, EA Hudson, T Ohba, ...Journal of Vacuum Science & Technology A 35 (5), 20171142017
4-)
Interfacial capping layers for interconnectsJ Yu, HJ Wu, G Dixit, B Van Schravendijk, P Subramonium, G Jiang, ...US Patent 8,268,722, 2012702012
5-)
MOCVD growth of non-epitaxial and epitaxial ZnS thin filmsJ Fang, PH Holloway, JE Yu, KS Jones, B Pathangey, E Brettschneider, ...Applied Surface Science 70, 701-706, 1993621993
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