Ji Sang Ahn

Ji Sang Ahn

Seoul National University of Science & Technology - Taoyuan / South Korea
Engineering & Technology / Metallurgical & Materials Engineering
AD Scientific Index ID: 5281201
龍華科技大學
person_outline Ji Sang Ahn's MOST POPULAR ARTICLES
1-) Plasma-enhanced atomic layer deposition of molybdenum carbide and carbonitride films using bis (isopropylcyclopentadienyl) molybdenum (IV) dihydride and an H2/N2/Ar plasmaW Kang, JS Ahn, JH HanJournal of Vacuum Science & Technology A 41 (6), 202332023
2-) Thermal atomic layer deposition of molybdenum carbide films using bis (ethylbenzene) molybdenum and H2JS Ahn, W Kang, JH HanJournal of Vacuum Science & Technology A 41 (1), 202332023
3-) Seed layer mediated growth of high dielectric and low leakage BaTiO3 thin film using two-step sputtering processW Kang, JS Ahn, JH HanCeramics International 47 (18), 25826-25831, 202122021
4-) Enhanced Oxidation Resistance and Interface Stability of Atomic-Layer-Deposited MoNx Electrodes via TiN Passivation for DRAM Cell Capacitor ApplicationsW Kang, JS Ahn, JH Lee, BJ Choi, JH HanACS Applied Materials & Interfaces, 20242024