Jianlin Chen

Jianlin Chen

Tohoku University - Sendai / Japan
Others
AD Scientific Index ID: 4769567
東北大学
person_outline Jianlin Chen's MOST POPULAR ARTICLES
1-) Laterally vibrating MEMS resonant vacuum sensor based on cavity-SOI process for evaluation of wide range of sealed cavity pressureC Liu, J Froemel, J Chen, T Tsukamoto, S TanakaMicrosystem Technologies 25 (2), 487-497, 2019182019
2-) Quad mass gyroscope with 16 ppm frequency mismatch trimmed by focus ion beamJ Chen, T Tsukamoto, S Tanaka2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL …, 2019132019
3-) Quad mass resonator with frequency mismatch of 3 ppm trimmed by focused ion beamJ Chen, T Tsukamoto, S TanakaJournal of Microelectromechanical Systems 30 (3), 392-400, 202172021
4-) Frequency and quality factor matched 2-axis dual mass resonatorJ Chen, T Tsukamoto, G Langfelder, S Tanaka2021 IEEE Sensors, 1-4, 2021102021
5-) Triple mass resonator with high capacity to tune frequency and quality factorJ Chen, T Tsukamoto, S Tanaka2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL …, 202092020