John Hoang

John Hoang

National Institute of Standards and Technology - Maryland / United States
Natural Sciences / Physics
AD Scientific Index ID: 4398425
person_outline John Hoang's MOST POPULAR ARTICLES
1-) Cobalt etch backJ Yang, B Zhou, M Shen, T Lill, J HoangUS Patent 9,870,899, 20181592018
2-) Nanostructure and temperature-dependent photoluminescence of Er-doped Y2O3 thin films for micro-optoelectronic integrated circuitsTT Van, J Hoang, R Ostroumov, KL Wang, JR Bargar, J Lu, HO Blom, ...Journal of applied physics 100 (7), 2006382006
3-) Feature profile evolution during shallow trench isolation etch in chlorine-based plasmas. I. Feature scale modelingJ Hoang, CC Hsu, JP ChangJournal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2008372008
4-) Optical properties of Y2O3 thin films doped with spatially controlled Er3+ by atomic layer depositionJ Hoang, TT Van, M Sawkar-Mathur, B Hoex, MCM Van de Sanden, ...Journal of applied physics 101 (12), 2007382007
5-) Liner and barrier applications for subtractive metal integrationHJ Wu, TJ Knisley, N Shankar, M Shen, J Hoang, P SharmaUS Patent 9,899,234, 2018242018