Ju Ho Kim

Ju Ho Kim

Hanyang University - Seoul / South Korea
Natural Sciences / Physics
AD Scientific Index ID: 4738640
한양대학교
person_outline Ju Ho Kim's MOST POPULAR ARTICLES
1-) Experimental investigation on plasma parameter profiles on a wafer level with reactor gap lengths in an inductively coupled plasmaJH Kim, YC Kim, CW ChungPhysics of Plasmas 22 (7), 073502, 2015102015
2-) Power dependence of electron density at various pressures in inductively coupled plasmasJY Kim, DH Kim, JH Kim, SB Jeon, SW Cho, CW ChungPhysics of Plasmas 21 (11), 113505, 2014102014
3-) On the E to H mode transition in a dual frequency (2 and 13.56 MHz) inductively coupled plasmaJH Kim, CW ChungPhysics of Plasmas 27 (2), 202092020
4-) High efficient plasma generation in an inductively coupled plasma using a passive resonant antennaJH Kim, YH Hong, CW ChungPlasma Sources Science and Technology 28 (10), 105018, 201982019
5-) Effect of low frequency power on the electron energy distribution function in argon inductively coupled plasmasJH Kim, DC Kwon, CW ChungJournal of Vacuum Science & Technology B 38 (2), 202072020