Juan Cristobal Mariscal

Juan Cristobal Mariscal

University of Arizona - Tucson / United States
Engineering & Technology / Chemical Engineering
AD Scientific Index ID: 5223328
person_outline Juan Cristobal Mariscal's MOST POPULAR ARTICLES
1-) Insights into tungsten chemical mechanical planarization: part I. surface micro-texture evolution during pad break-in ECS Journal of Solid State Science and Technology 8 (5), P3091, 2019
2-) Tribological, thermal and kinetic characterization of SiO2 and Si3N4 polishing for STI CMP on blanket and patterned wafers ECS Journal of Solid State Science and Technology 9 (4), 044008, 2020
3-) Insights into tungsten chemical mechanical planarization: part II. Effect of pad surface micro-texture on frictional, thermal and kinetic aspects of the process ECS Journal of Solid State Science and Technology 8 (5), P3175, 2019
4-) Effect of abrasive nanoparticle concentration on the tribological, thermal and kinetic attributes of tungsten chemical mechanical planarization ECS Journal of Solid State Science and Technology 9 (2), 024014, 2020
5-) Insights into tungsten chemical mechanical planarization: part III. Mini-marathons and associated numerical simulations ECS Journal of Solid State Science and Technology 8 (5), P3190, 2019