Kenneth A Goldberg

Kenneth A Goldberg

Lawrence Berkeley National Laboratory - Berkeley / United States
Natural Sciences / Physics
AD Scientific Index ID: 4443616
person_outline Kenneth A Goldberg's MOST POPULAR ARTICLES
1-) Phase-shifting point diffraction interferometerH Medecki, E Tejnil, KA Goldberg, J BokorOptics letters 21 (19), 1526-1528, 19962101996
2-) Fourier-transform method of phase-shift determinationKA Goldberg, J BokorApplied optics 40 (17), 2886-2894, 20011512001
3-) Extreme-ultraviolet phase-shifting point-diffraction interferometer: a wave-front metrology tool with subangstrom reference-wave accuracyPP Naulleau, KA Goldberg, SH Lee, C Chang, D Attwood, J BokorApplied Optics 38 (35), 7252-7263, 19991461999
4-) Hartmann wave-front measurement at 13.4 nm with λEUV/120 accuracyP Mercère, P Zeitoun, M Idir, S Le Pape, D Douillet, X Levecq, G Dovillaire, ...Optics letters 28 (17), 1534-1536, 20031302003
5-) Status of EUV micro-exposure capabilities at the ALS using the 0.3-NA MET opticP Naulleau, KA Goldberg, EH Anderson, K Bradley, R Delano, P Denham, ...Emerging Lithographic Technologies VIII 5374, 881-891, 20041142004