Kenneth P Rodbell

Kenneth P Rodbell

IBM Corporation - New York / United States
Engineering & Technology / Metallurgical & Materials Engineering
AD Scientific Index ID: 4464224
person_outline Kenneth P Rodbell's MOST POPULAR ARTICLES
1-) Copper metallization for high performance silicon technologyR Rosenberg, DC Edelstein, CK Hu, KP RodbellAnnual Review of Materials Research 30, 229, 20005492000
2-) Measurement of the flux and energy spectrum of cosmic-ray induced neutrons on the groundMS Gordon, P Goldhagen, KP Rodbell, TH Zabel, HHK Tang, JM Clem, ...IEEE Transactions on Nuclear Science 51 (6), 3427-3434, 20044532004
3-) Mechanisms for microstructure evolution in electroplated copper thin films near room temperatureJME Harper, C Cabral Jr, PC Andricacos, L Gignac, IC Noyan, KP Rodbell, ...Journal of applied physics 86 (5), 2516-2525, 19994401999
4-) Method of chemical-mechanical polishing an electronic component substrate and polishing slurry thereforJW Carr, LD David, WL Guthrie, FB Kaufman, WJ Patrick, KP Rodbell, ...US Patent 4,954,142, 19902841990
5-) Microstructure control in semiconductor metallizationJME Harper, KP RodbellJournal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 19972271997