Luca Lamagna

Luca Lamagna

STMicroelectronics Pvt Ltd - Geneva / France
Natural Sciences / Physics
AD Scientific Index ID: 4440351
person_outline Luca Lamagna's MOST POPULAR ARTICLES
1-) Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD”E Ahvenniemi, AR Akbashev, S Ali, M Bechelany, M Berdova, S Boyadjiev, ...Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 35 (1 …, 2017952017
2-) Vibrational and electrical properties of hexagonal filmsG Scarel, A Debernardi, D Tsoutsou, S Spiga, SC Capelli, L Lamagna, ...Applied Physics Letters 91 (10), 102901, 2007682007
3-) Atomic layer deposition of Ru from CpRu (CO) 2Et using O2 gas and O2 plasmaN Leick, ROF Verkuijlen, L Lamagna, E Langereis, S Rushworth, ...Journal of Vacuum Science & Technology A 29 (2), 2011592011
4-) Behavior of phosphorous and contaminants from molecular doping combined with a conventional spike annealing methodY Shimizu, H Takamizawa, K Inoue, F Yano, Y Nagai, L Lamagna, ...Nanoscale 6 (2), 706-710, 2013582013
5-) Infrared spectroscopy and X-ray diffraction studies on the crystallographic evolution of La2O3 films upon annealingD Tsoutsou, G Scarel, A Debernardi, SC Capelli, SN Volkos, L Lamagna, ...Microelectronic Engineering 85 (12), 2411-2413, 2008542008