Marc Fouchier

Marc Fouchier

CEA (Commissariat à l'Energie Atomique et aux Energies Alternatives) - Gif-sur-Yvette / France
Engineering & Technology / Electrical & Electronic Engineering
AD Scientific Index ID: 4405994
The French Alternative Energies and Atomic Energy Commission
person_outline Marc Fouchier's MOST POPULAR ARTICLES
1-) Scanning probe microscopy: electrical and electromechanical phenomena at the nanoscaleSV Kalinin, A GruvermanSpringer Science & Business Media, 20075482007
2-) Assessing the performance of two-dimensional dopant profiling techniquesN Duhayon, P Eyben, M Fouchier, T Clarysse, W Vandervorst, D Álvarez, ...Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2004742004
3-) Sub-5-nm-spatial resolution in scanning spreading resistance microscopy using full-diamond tipsD Alvarez, J Hartwich, M Fouchier, P Eyben, W VandervorstApplied physics letters 82 (11), 1724-1726, 2003742003
4-) An atomic force microscopy-based method for line edge roughness measurementM Fouchier, E Pargon, B BardetJournal of applied physics 113 (10), 2013592013
5-) Unbiased line width roughness measurements with critical dimension scanning electron microscopy and critical dimension atomic force microscopyL Azarnouche, E Pargon, K Menguelti, M Fouchier, D Fuard, P Gouraud, ...Journal of Applied Physics 111 (8), 2012562012