Markku Leskela

Markku Leskela

University of Helsinki - Helsinki / Finland
Natural Sciences / Chemical Sciences
AD Scientific Index ID: 1657349
Helsingin yliopisto
person_outline Markku Leskela's MOST POPULAR ARTICLES
1-) Atomic layer deposition (ALD): from precursors to thin film structures Thin solid films 409 (1), 138-146, 2002
2-) Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends Journal of Applied Physics 113 (2), 2013
3-) Atomic layer deposition chemistry: recent developments and future challenges Angewandte Chemie International Edition 42 (45), 5548-5554, 2003
4-) Atomic layer deposition Handbook of Thin Films, 103-159, 2002
5-) Atomic layer deposition of oxide thin films with metal alkoxides as oxygen sources Science 288 (5464), 319-321, 2000