Matteo Ferri

Matteo Ferri

Institute for Microelectronics and Microsystems, CNR - / Italy
Others
AD Scientific Index ID: 5006117
Istituto per la microelettronica e i microsistemi, CNR
person_outline Matteo Ferri's MOST POPULAR ARTICLES
1-) Transient enhanced diffusion of arsenic in silicon S Solmi, M Ferri, M Bersani, D Giubertoni, V Soncini Journal of applied physics 94 (8), 4950-4955, 2003 972003
2-) Carbon-cap for ohmic contacts on ion-implanted 4H–SiC R Nipoti, F Mancarella, F Moscatelli, R Rizzoli, S Zampolli, M Ferri Electrochemical and Solid-State Letters 13 (12), H432, 2010 622010
3-) Arsenic uphill diffusion during shallow junction formation M Ferri, S Solmi, A Parisini, M Bersani, D Giubertoni, M Barozzi Journal of Applied Physics 99 (11), 2006 552006
4-) Fabrication of high-resolution strain sensors based on wafer-level vacuum packaged MEMS resonatorsL Belsito, M Ferri, F Mancarella, L Masini, J Yan, AA Seshia, K Soga, ...Sensors and Actuators A: Physical 239, 90-101, 2016362016
5-) Miniaturized fiber-optic ultrasound probes for endoscopic tissue analysis by micro-opto-mechanical technologyE Vannacci, L Belsito, F Mancarella, M Ferri, GP Veronese, A Roncaglia, ...Biomedical microdevices 16, 415-426, 2014292014