Matthias Bauer

Matthias Bauer

Applied Materials, Inc. - Santa Clara / United States
Engineering & Technology / Metallurgical & Materials Engineering
AD Scientific Index ID: 4400029
person_outline Matthias Bauer's MOST POPULAR ARTICLES
1-) Cyclical Epitaxial Deposition And EtchM Bauer, SG ThomasUS Patent 8,367,528, 20133792013
2-) Selective epitaxial formation of semiconductor filmsM Bauer, KD WeeksUS Patent 8,278,176, 20123372012
3-) High throughput cyclical epitaxial deposition and etch processM BauerUS Patent 8,809,170, 20142842014
4-) Apparatus and method for depositing silicon germanium filmsP Tomasini, M Bauer, N CodyUS Patent 2007/0,155,138, 20075122007
5-) Inhibitors for selective deposition of silicon containing filmsM Bauer, P TomasiniUS Patent 7,939,447, 20115032011