Meiyi Wu

Meiyi Wu

Institute of Advanced Science Facilities, Shenzhen - Shenzhen / China
Others
AD Scientific Index ID: 5096580
person_outline Meiyi Wu's MOST POPULAR ARTICLES
1-) Realization of wafer-scale nanogratings with sub-50 nm period through vacancy epitaxy Q Huang, Q Jia, J Feng, H Huang, X Yang, J Grenzer, K Huang, S Zhang, ... Nature Communications 10 (1), 2437, 2019 372019
2-) Study of novel EUVL mask absorber candidatesM Wu, D Thakare, JF De Marneffe, P Jaenen, L Souriau, K Opsomer, ...Journal of Micro/Nanopatterning, Materials, and Metrology 20 (2), 021002-021002, 2021312021
3-) Determination of optical constants of thin films in the EUVR Ciesielski, Q Saadeh, V Philipsen, K Opsomer, JP Soulié, M Wu, ...Applied Optics 61 (8), 2060-2078, 2022292022
4-) High reflectance nanoscale V/Sc multilayer for soft X-ray water window regionQ Huang, Q Yi, Z Cao, R Qi, RA Loch, P Jonnard, M Wu, A Giglia, W Li, ...Scientific reports 7 (1), 12929, 2017252017
5-) Refined extreme ultraviolet mask stack modelIA Makhotkin, M Wu, V Soltwisch, F Scholze, V PhilipsenJOSA A 38 (4), 498-503, 2021192021