Miguel Angel Gosalvez

Miguel Angel Gosalvez

Centro de Física de Materiales - San Sebastián / Spain
Others
AD Scientific Index ID: 4433451
Materials Physics Center
person_outline Miguel Angel Gosalvez's MOST POPULAR ARTICLES
1-) An atomistic introduction to anisotropic etchingMA Gosálvez, K Sato, AS Foster, RM Nieminen, H TanakaJournal of Micromechanics and Microengineering 17 (4), S1, 20071422007
2-) Surface morphology during anisotropic wet chemical etching of crystalline siliconMA Gosálvez, RM NieminenNew Journal of Physics 5 (1), 100, 20031392003
3-) Improvement in smoothness of anisotropically etched silicon surfaces: effects of surfactant and TMAH concentrationsD Cheng, MA Gosálvez, T Hori, K Sato, M ShikidaSensors and Actuators A: Physical 125 (2), 415-421, 2006892006
4-) Study of corner compensating structures and fabrication of various shapes of MEMS structures in pure and surfactant added TMAHP Pal, K Sato, M Shikida, MA GosálvezSensors and actuators A: Physical 154 (2), 192-203, 2009882009
5-) Study of rounded concave and sharp edge convex corners undercutting in CMOS compatible anisotropic etchantsP Pal, K Sato, MA Gosalvez, M ShikidaJournal of Micromechanics and Microengineering 17 (11), 2299, 2007842007