Miika Mattinen

Miika Mattinen

Eindhoven University of Technology - Eindhoven / Netherlands
Engineering & Technology / Metallurgical & Materials Engineering
AD Scientific Index ID: 4426928
Technische Universiteit Eindhoven
person_outline Miika Mattinen's MOST POPULAR ARTICLES
1-) Method for depositing a metal chalcogenide on a substrate by cyclical depositionM Mattinen, M Ritala, M LeskeläUS Patent 10,734,223, 20203192020
2-) Methods and apparatus for depositing a chalcogenide film and structures including the filmM Mattinen, M Ritala, M LeskeläUS Patent App. 17/007,221, 20212192021
3-) Atomic Layer Deposition of Crystalline MoS2 Thin Films: New Molybdenum Precursor for Low‐Temperature Film GrowthM Mattinen, T Hatanpää, T Sarnet, K Mizohata, K Meinander, PJ King, ...Advanced Materials Interfaces 4 (18), 1700123, 20171352017
4-) Atomic Layer Deposition of Emerging 2D Semiconductors, HfS2 and ZrS2, for OptoelectronicsM Mattinen, G Popov, M Vehkamaki, PJ King, K Mizohata, P Jalkanen, ...Chemistry of Materials 31 (15), 5713-5724, 20191022019
5-) Atomic layer deposition of optoelectronic materialsM Leskelä, M Mattinen, M RitalaJournal of Vacuum Science & Technology B 37 (3), 2019832019