Mikael Broas

Mikael Broas

Aalto University - Espoo / Finland
Engineering & Technology / Electrical & Electronic Engineering
AD Scientific Index ID: 4768217
Aalto-yliopisto
person_outline Mikael Broas's MOST POPULAR ARTICLES
1-) Chemically Stable Atomic-Layer-Deposited Al2O3 Films for ProcessabilityM Broas, O Kanninen, V Vuorinen, M Tilli, M Paulasto-KröckelACS omega 2 (7), 3390-3398, 2017502017
2-) Corrosion protection of steel with multilayer coatings: Improving the sealing properties of physical vapor deposition CrN coatings with Al2O3/TiO2 atomic layer deposition …J Leppäniemi, P Sippola, M Broas, J Aromaa, H Lipsanen, J KoskinenThin Solid Films 627, 59-68, 2017462017
3-) Shock impact reliability and failure analysis of a three-axis MEMS gyroscopeJ Li, M Broas, J Makkonen, TT Mattila, J Hokka, M Paulasto-KröckelJournal of microelectromechanical systems 23 (2), 347-355, 2013442013
4-) Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride filmsM Broas, P Sippola, T Sajavaara, V Vuorinen, A Pyymaki Perros, ...Journal of vacuum science & technology A 34 (4), 2016392016
5-) Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasmaV Rontu, P Sippola, M Broas, G Ross, T Sajavaara, H Lipsanen, ...Journal of Vacuum Science & Technology A 36 (2), 2018282018