Mikhail Baklanov

Mikhail Baklanov

North China University of Technology - Beijing / China
Engineering & Technology / Metallurgical & Materials Engineering
AD Scientific Index ID: 684395
北方工业大学
person_outline Mikhail Baklanov's MOST POPULAR ARTICLES
1-) Low dielectric constant materials for microelectronicsK Maex, MR Baklanov, D Shamiryan, F Lacopi, SH Brongersma, ...Journal of Applied Physics 93 (11), 8793-8841, 200318752003
2-) Determination of pore size distribution in thin films by ellipsometric porosimetryMR Baklanov, KP Mogilnikov, VG Polovinkin, FN DultsevJournal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 20006252000
3-) Fabrication of porogen residues free and mechanically robust low-k materialsAM Urbanowicz, P Verdonck, D Shamiryan, K Vanstreels, M Baklanov, ...US Patent App. 12/831,935, 20114222011
4-) Disorder-Induced Inhomogeneities of the Superconducting State<? format?> Close to the Superconductor-Insulator TransitionB Sacépé, C Chapelier, TI Baturina, VM Vinokur, MR Baklanov, ...Physical review letters 101 (15), 157006, 20084342008
5-) Plasma processing of low-k dielectricsMR Baklanov, JF de Marneffe, D Shamiryan, AM Urbanowicz, H Shi, ...Journal of Applied Physics 113 (4), 20133602013