MJ De Boer Meint

MJ De Boer Meint

University of Twente - Enschede / Netherlands
Natural Sciences / Physics
AD Scientific Index ID: 1809718
Universiteit Twente
person_outline MJ De Boer Meint's MOST POPULAR ARTICLES
1-) The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile controlH Jansen, M de Boer, R Legtenberg, M ElwenspoekJournal of Micromechanics and Microengineering 5 (2), 115, 19957051995
2-) A survey on the reactive ion etching of silicon in microtechnologyH Jansen, H Gardeniers, M de Boer, M Elwenspoek, J FluitmanJournal of micromechanics and microengineering 6 (1), 14, 19966211996
3-) Silicon micromachined hollow microneedles for transdermal liquid transportHJGE Gardeniers, R Luttge, EJW Berenschot, MJ De Boer, SY Yeshurun, ...Journal of Microelectromechanical systems 12 (6), 855-862, 20035352003
4-) Black silicon method X: a review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as …HV Jansen, MJ De Boer, S Unnikrishnan, MC Louwerse, MC ElwenspoekJournal of micromechanics and microengineering 19 (3), 033001, 20093692009
5-) Micromachining of buried micro channels in siliconMJ de Boer, RW Tjerkstra, JW Berenschot, HV Jansen, GJ Burger, ...Journal of Microelectromechanical systems 9 (1), 94-103, 20003212000