Mohamed Boufnichel

Mohamed Boufnichel

STMicroelectronics Pvt Ltd - Geneva / France
Engineering & Technology / Electrical & Electronic Engineering
AD Scientific Index ID: 4440485
person_outline Mohamed Boufnichel's MOST POPULAR ARTICLES
1-) Cryogenic etching of deep narrow trenches in silicon Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 18 (4 …, 2000
2-) Passivation mechanisms in cryogenic SF6/O2 etching process Journal of Micromechanics and Microengineering 14 (2), 190, 2003
3-) Passivation mechanisms in cryogenic SF6/O2 etching process Journal of Micromechanics and Microengineering 14 (2), 190, 2003
4-) SiOxFy passivation layer in silicon cryoetching Journal of Applied Physics 98 (10), 2005
5-) Profile control of high aspect ratio trenches of silicon. I. Effect of process parameters on local bowing Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2002