Naftali E Lustig

Naftali E Lustig

IBM Corporation - New York / United States
Engineering & Technology / Metallurgical & Materials Engineering
AD Scientific Index ID: 4464714
person_outline Naftali E Lustig's MOST POPULAR ARTICLES
1-) Full copper wiring in a sub-0.25/spl mu/m CMOS ULSI technologyD Edelstein, J Heidenreich, R Goldblatt, W Cote, C Uzoh, N Lustig, ...International Electron Devices Meeting. IEDM Technical Digest, 773-776, 1997733*1997
2-) In-situ endpoint detection and process monitoring method and apparatus for chemical-mechanical polishingNE Lustig, KL Saenger, HM TongUS Patent 5,433,651, 19955131995
3-) Diamond-like carbon films from a hydrocarbon helium plasmaFD Bailey, DA Buchanan, AC Callegari, HM Clearfield, FE Doany, ...US Patent 5,470,661, 19953071995
4-) Chip to wiring interface with single metal alloy layer applied to surface of copper interconnectCJ Sambucetti, X Chen, SC Seo, BN Agarwala, CK Hu, NE Lustig, ...US Patent 6,573,606, 20033062003
5-) Planar copperpolyimide back end of the line interconnections for ULSI devicesG B. Luther, White, Uzoh, Cacouris, LustigVLSI Multilevel Interconnection Conference 1993 (VMIC), 15-21, 1993226*1993