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Nerissa Draeger|Nerissa Taylor
AD Scientific Index 2024
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Lam Research Corp. - / United States
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Nerissa Draeger|Nerissa Taylor's MOST POPULAR ARTICLES
1-)
CVD flowable gap fillF Wang, VY Lu, B Lu, WF Yau, N DraegerUS Patent 8,187,951, 20123752012
2-)
Bottom up fill in high aspect ratio trenches L Nittala, K Shannon, N Draeger, M Rathod, H Te Nijenhuis, ... US Patent App. 13/313,735, 2012 3542012
3-)
Sequential UV induced chemical vapor deposition JA Fair, N Taylor US Patent 7,897,215, 2011 3422011
4-)
Sequential ion, UV, and electron induced chemical vapor depositionJA Fair, W van den Hoek, N TaylorUS Patent 6,627,268, 20033972003
5-)
Sequential electron induced chemical vapor depositionJA Fair, N TaylorUS Patent 6,720,260, 20043942004
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