Pankwi Park

Pankwi Park

Samsung Electronics, South Korea - / South Korea
Engineering & Technology / Electrical & Electronic Engineering
AD Scientific Index ID: 4438906
삼성전자, 한국
person_outline Pankwi Park's MOST POPULAR ARTICLES
1-) Enhancement of dielectric constant in thin films by the addition of PK Park, SW KangApplied physics letters 89 (19), 192905, 20061292006
2-) Interfacial layer properties of HfO2 films formed by plasma-enhanced atomic layer deposition on siliconPK Park, JS Roh, BH Choi, SW KangElectrochemical and solid-state letters 9 (5), F34, 2006562006
3-) Interface effect on dielectric constant of HfO2∕ Al2O3 nanolaminate films deposited by plasma-enhanced atomic layer depositionPK Park, ES Cha, SW KangApplied physics letters 90 (23), 2007552007
4-) Applicability of step-coverage modeling to TiO2 thin films in atomic layer depositionJY Kim, JH Kim, JH Ahn, PK Park, SW KangJournal of The Electrochemical Society 154 (12), H1008, 2007312007
5-) Semiconductor devices including a stressor in a recess and methods of forming the sameDS Shin, HC Kang, D Roh, PK Park, S Geo-Myung, N Lee, CW Lee, ...US Patent 9,129,952, 2015272015