Patrick Naulleau|Patrick P. Naulleau

Patrick Naulleau|Patrick P. Naulleau

Lawrence Berkeley National Laboratory - Berkeley / United States
Natural Sciences / Physics
AD Scientific Index ID: 4443565
person_outline Patrick Naulleau|Patrick P. Naulleau's MOST POPULAR ARTICLES
1-) Real space soft x-ray imaging at 10 nm spatial resolutionW Chao, P Fischer, T Tyliszczak, S Rekawa, E Anderson, P NaulleauOptics express 20 (9), 9777-9783, 20122552012
2-) Extreme-ultraviolet phase-shifting point-diffraction interferometer: a wave-front metrology tool with subangstrom reference-wave accuracyPP Naulleau, KA Goldberg, SH Lee, C Chang, D Attwood, J BokorApplied Optics 38 (35), 7252-7263, 19991461999
3-) Hartmann wave-front measurement at 13.4 nm with λEUV/120 accuracyP Mercère, P Zeitoun, M Idir, S Le Pape, D Douillet, X Levecq, G Dovillaire, ...Optics letters 28 (17), 1534-1536, 20031232003
4-) Status of EUV micro-exposure capabilities at the ALS using the 0.3-NA MET opticP Naulleau, KA Goldberg, EH Anderson, K Bradley, R Delano, P Denham, ...Emerging Lithographic Technologies VIII 5374, 881-891, 20041132004
5-) Directly patterned inorganic hardmask for EUV lithographyJK Stowers, A Telecky, M Kocsis, BL Clark, DA Keszler, A Grenville, ...Extreme Ultraviolet (EUV) Lithography II 7969, 386-396, 20111022011