Prem Pal

Prem Pal

Indian Institute of Technology, Hyderabad - Hyderabad / India
Natural Sciences / Physics
AD Scientific Index ID: 354311
person_outline Prem Pal's MOST POPULAR ARTICLES
1-) A comprehensive review on convex and concave corners in silicon bulk micromachining based on anisotropic wet chemical etchingP Pal, K SatoMicro and Nano Systems Letters 3, 1-42, 20151252015
2-) Fabrication techniques of convex corners in a (1 0 0)-silicon wafer using bulk micromachining: a reviewP Pal, K Sato, S ChandraJournal of Micromechanics and Microengineering 17 (10), R111, 20071252007
3-) High speed silicon wet anisotropic etching for applications in bulk micromachining: a reviewP Pal, V Swarnalatha, AVN Rao, AK Pandey, H Tanaka, K SatoMicro and Nano Systems Letters 9, 1-59, 2021982021
4-) Various shapes of silicon freestanding microfluidic channels and microstructures in one-step lithographyP Pal, K SatoJournal of Micromechanics and Microengineering 19 (5), 055003, 2009902009
5-) Study of corner compensating structures and fabrication of various shapes of MEMS structures in pure and surfactant added TMAHP Pal, K Sato, M Shikida, MA GosálvezSensors and actuators A: Physical 154 (2), 192-203, 2009872009