Quan Yuan

Institute of Semiconductors, Chinese Academy of Sciences - Beijing / China

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AD Scientific Index ID: 4601619

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Quan Yuan's MOST POPULAR ARTICLES

1-) Design and fabrication of integrated magnetic MEMS energy harvester for low frequency applicationsM Han, Q Yuan, X Sun, H ZhangJournal of Microelectromechanical Systems 23 (1), 204-212, 2013892013

2-) Electrodeposition and characterization of CoNiMnP permanent magnet arrays for MEMS sensors and actuatorsX Sun, Q Yuan, D Fang, H ZhangSensors and Actuators A: Physical 188, 190-197, 2012212012

3-) A low feed-through 3D vacuum packaging technique with silicon vias for RF MEMS resonatorsJ Zhao, Q Yuan, X Kan, J Yang, F YangJournal of Micromechanics and Microengineering 27 (1), 014003, 2016182016

4-) Electrodeposition and characterization of CoNiMnP-based permanent magnetic film for MEMS applicationsXM Sun, Q Yuan, DM Fang, HX Zhang2011 6th IEEE International Conference on Nano/Micro Engineered and …, 2011182011

5-) Frequency stability of RF-MEMS disk resonatorsQ Yuan, W Luo, H Zhao, B Peng, J Yang, F YangIEEE Transactions on Electron Devices 62 (5), 1603-1608, 2015172015

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