Richard S Muller

Richard S Muller

University of California Berkeley - Berkeley / United States
Engineering & Technology / Electrical & Electronic Engineering
AD Scientific Index ID: 1738837
person_outline Richard S Muller's MOST POPULAR ARTICLES
1-) Device electronics for integrated circuits John Wiley & Sons, 2002
2-) Surface micromachining for microelectromechanical systems Proceedings of the IEEE 86 (8), 1552-1574, 1998
3-) Etch rates for micromachining processing Journal of Microelectromechanical systems 5 (4), 256-269, 1996
4-) IC-processed electrostatic micromotors Sensors and actuators 20 (1-2), 41-47, 1989
5-) Integrated movable micromechanical structures for sensors and actuators IEEE Transactions on Electron Devices 35 (6), 724-730, 1988