Robert D Allen

Robert D Allen

IBM Corporation - New York / United States
Natural Sciences / Chemical Sciences
AD Scientific Index ID: 4465054
person_outline Robert D Allen's MOST POPULAR ARTICLES
1-) Expanding plastics recycling technologies: chemical aspects, technology status and challenges Green Chemistry 24 (23), 8899-9002, 2022
2-) Preparation of high purity, anionic polymerization grade alkyl methacrylate monomers Polymer Bulletin 15 (2), 127-134, 1986
3-) Limits to etch resistance for 193-nm single-layer resists Advances in Resist Technology and Processing XIII 2724, 365-376, 1996
4-) Supercritical CO2 Processing for Submicron Imaging of Fluoropolymers Chemistry of materials 12 (1), 41-48, 2000
5-) 193-nm single-layer positive resists: building etch resistance into a high-resolution imaging system Advances in Resist Technology and Processing XII 2438, 474-485, 1995